Cryogenic pump principle and structure

[Asia Fluid Network News] Condensate pump is mainly the use of low-temperature surface condensate gas vacuum pump. We also refer to this type of vacuum pump as a cryogenic pump, which is a vacuum pump with the lowest ultimate pressure and the highest suction rate for obtaining a clean vacuum. Now it is widely used in the research and production of semiconductors and integrated circuits, molecular beam research, vacuum coating equipment , Vacuum surface analysis instruments, ion implanters and space simulation devices. Cryogenic pump With the current use of cryogenic pumps to increase its understanding of the working principle is necessary, then the main principle of cryogenic pump works: In the cryogenic pump with liquid helium or refrigerator cooling to a very low temperature of the cold plate . It condenses the gas and maintains the vapor pressure of the condensate below the pump's ultimate pressure to achieve the suction effect. Low-temperature pumping of the main role is low-temperature condensation, low temperature adsorption and low temperature capture. ① cryogenic condensation: gas molecules condense on the surface of the cold plate or condensed in the condensed gas layer, the equilibrium pressure is substantially equal to the condensate vapor pressure. When pumping air, the temperature of the cold plate must be lower than 25K; when hydrogen is drawn, the cold plate temperature is lower. Cryogenic condensate suction condensate thickness up to about 10 mm. ② Low Temperature Adsorption: Gas molecules are adsorbed onto the surface of the adsorbent coated on a cold plate with a single monolayer thickness (on the order of 10-8 cm). The adsorption equilibrium pressure is much lower than the vapor pressure at the same temperature. If at 20K, the vapor pressure of hydrogen is equal to the atmospheric pressure, adsorption equilibrium pressure is less than 10-8 Pa when absorbing hydrogen with 20K activated carbon. This makes it possible to evacuate by cryogenic adsorption at higher temperatures. ③ cryogenic capture: gas molecules that can not be condensed at the extraction temperature are buried and adsorbed by the growing layer of condensable gas. In general, the pump's ultimate pressure is the vapor pressure of the condensing gas at cold plate temperature. When the temperature is 120K, the vapor pressure of water is lower than 10-8 Pa. When the temperature is 20K, in addition to helium, neon and hydrogen, other gases vapor pressure is also lower than 10-8 Pa. However, the pressure at the pump is higher than the vapor pressure of the condensate due to the difference in temperature between the container and the cold plate. For a container at room temperature, the pump's ultimate pressure is about 4 times the condensate vapor pressure at a cryogenic plate of 20K. With the cryogenic pump in the molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters and space simulation devices and other fields widely used. Reinforcing the study of how it works is not only a beneficial way for producers to study production, it is equally important for consumers to use and understand the meaning of the product. Related Articles: Sputtering Ion Pump Principle and Structure Diagram Getter Ion Pump Principle and Structure Diagram

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